Process Developments on Sheet Molding and Redistribution Deposition for Cu-Pillar Chips

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Contributors

Abstract

Drivers for 3D packaging solutions are increasing constantly. This work investigated a new interconnect technique using sheet molding process to enable Package-on-Package (PoP) stacking. This technique is based on sheet molding compound (SMC), which is suitable for multi-layer structures, thin and large area packaging. With the assist of vacuum, multiple singulated thinned Cu-pillar chips could be embedded in the sheet mold, to enable panel-level-packaging or wafer-level packaging following the mold-first approach. In this work, the feasibility of replacing the conventional epoxy-based molding compound (EMC) by SMC is investigated by experiments on different Cu-pillar standoffs and pitches. Furthermore, shear test of Cu buttons 200 \mu {{\mathrm m}} in diameter and 40 \mu {\mathrm m} in height is carried out to determine the adhesion of the deposited layer on the SMC surface.

Details

Original languageEnglish
Title of host publication2022 45th International Spring Seminar on Electronics Technology, ISSE 2022
PublisherIEEE Computer Society, Washington
ISBN (electronic)9781665465892
ISBN (print)9781665465892
Publication statusPublished - 2022
Peer-reviewedYes

Publication series

SeriesInternational Spring Seminar on Electronics Technology (ISSE)
Volume2022-May
ISSN2161-2528

Conference

Title2022 45th International Spring Seminar on Electronics Technology
SubtitleElectronics Technology Innovations towards Green Electronics
Abbreviated titleISSE 2022
Conference number45
Duration11 - 15 May 2022
LocationHotel Springer Schlössl & online
CityVienna
CountryAustria

External IDs

Mendeley 32ae6650-df92-391f-9b81-1eb05052e85a
ORCID /0000-0002-0757-3325/work/139064766
ORCID /0000-0001-9720-0727/work/192581546