Process Developments on Sheet Molding and Redistribution Deposition for Cu-Pillar Chips
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Drivers for 3D packaging solutions are increasing constantly. This work investigated a new interconnect technique using sheet molding process to enable Package-on-Package (PoP) stacking. This technique is based on sheet molding compound (SMC), which is suitable for multi-layer structures, thin and large area packaging. With the assist of vacuum, multiple singulated thinned Cu-pillar chips could be embedded in the sheet mold, to enable panel-level-packaging or wafer-level packaging following the mold-first approach. In this work, the feasibility of replacing the conventional epoxy-based molding compound (EMC) by SMC is investigated by experiments on different Cu-pillar standoffs and pitches. Furthermore, shear test of Cu buttons 200 \mu {{\mathrm m}} in diameter and 40 \mu {\mathrm m} in height is carried out to determine the adhesion of the deposited layer on the SMC surface.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2022 45th International Spring Seminar on Electronics Technology, ISSE 2022 |
| Herausgeber (Verlag) | IEEE Computer Society, Washington |
| ISBN (elektronisch) | 9781665465892 |
| ISBN (Print) | 9781665465892 |
| Publikationsstatus | Veröffentlicht - 2022 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | International Spring Seminar on Electronics Technology (ISSE) |
|---|---|
| Band | 2022-May |
| ISSN | 2161-2528 |
Konferenz
| Titel | 2022 45th International Spring Seminar on Electronics Technology |
|---|---|
| Untertitel | Electronics Technology Innovations towards Green Electronics |
| Kurztitel | ISSE 2022 |
| Veranstaltungsnummer | 45 |
| Dauer | 11 - 15 Mai 2022 |
| Ort | Hotel Springer Schlössl & online |
| Stadt | Vienna |
| Land | Österreich |
Externe IDs
| Mendeley | 32ae6650-df92-391f-9b81-1eb05052e85a |
|---|---|
| ORCID | /0000-0002-0757-3325/work/139064766 |
| ORCID | /0000-0001-9720-0727/work/192581546 |