Process Developments on Sheet Molding and Redistribution Deposition for Cu-Pillar Chips

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

Drivers for 3D packaging solutions are increasing constantly. This work investigated a new interconnect technique using sheet molding process to enable Package-on-Package (PoP) stacking. This technique is based on sheet molding compound (SMC), which is suitable for multi-layer structures, thin and large area packaging. With the assist of vacuum, multiple singulated thinned Cu-pillar chips could be embedded in the sheet mold, to enable panel-level-packaging or wafer-level packaging following the mold-first approach. In this work, the feasibility of replacing the conventional epoxy-based molding compound (EMC) by SMC is investigated by experiments on different Cu-pillar standoffs and pitches. Furthermore, shear test of Cu buttons 200 \mu {{\mathrm m}} in diameter and 40 \mu {\mathrm m} in height is carried out to determine the adhesion of the deposited layer on the SMC surface.

Details

OriginalspracheEnglisch
Titel2022 45th International Spring Seminar on Electronics Technology, ISSE 2022
Herausgeber (Verlag)IEEE Computer Society, Washington
ISBN (elektronisch)9781665465892
ISBN (Print)9781665465892
PublikationsstatusVeröffentlicht - 2022
Peer-Review-StatusJa

Publikationsreihe

ReiheInternational Spring Seminar on Electronics Technology (ISSE)
Band2022-May
ISSN2161-2528

Konferenz

Titel2022 45th International Spring Seminar on Electronics Technology
UntertitelElectronics Technology Innovations towards Green Electronics
KurztitelISSE 2022
Veranstaltungsnummer45
Dauer11 - 15 Mai 2022
OrtHotel Springer Schlössl & online
StadtVienna
LandÖsterreich

Externe IDs

Mendeley 32ae6650-df92-391f-9b81-1eb05052e85a
ORCID /0000-0002-0757-3325/work/139064766
ORCID /0000-0001-9720-0727/work/192581546