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Multi-scale radiographic applications in microelectronic industry

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review

Contributors

J Gluch - , Chair of Materials Science and Nanotechnology (Author)
M Löffler - , Dresden Center for Nanoanalysis (DCN) (Author)
N Meyendorf - (Author)
M Oppermann - , Centre for Microtechnical Manufacturing (Author)
M Röllig - , Chair of Electronic Packaging Technology, Chair of Highly-Parallel VLSI Systems and Neuro-Microelectronics (Author)
P Sättler - , Chair of Electronic Packaging Technology (Author)
KJ Wolter - , Chair of Electronic Packaging Technology (Author)
Ehrenfried Zschech - (Author)

Details

Original language	English
Title of host publication	AIP Conference Proceedings
Pages	020026
Number of pages	1
Volume	1706
Publication status	Published - 2016
Peer-reviewed	Yes

External IDs

Scopus	84984548103

Keywords