Integration challenges of ferroelectric hafnium oxide based embedded memory

Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Invited › peer-review

Contributors

J. Müller - (Author)
P. Polakowski - , Chair of Opto-Electronic Components and Systems (Author)
J. Paul - (Author)
S. Riedel - (Author)
R. Hoffmann - (Author)
M. Drescher - , Institute of Semiconductors and Microsystems, Professor (rtd.) for Semiconductors (Author)
S. Slesazeck - (Author)
S. Müller - (Author)
H. Mulaosmanovic - (Author)
U. Schroeder - (Author)
T. Mikolajick - , Chair of Nanoelectronics (Author)
S. Flachowsky - (Author)
E. Erben - (Author)
E. Smith - (Author)
R. Binder - (Author)
D. Triyoso - (Author)
J. Metzger - (Author)
S. Kolodinski - (Author)

Scopus	84945909268