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Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena

ISSNs: 2166-2746, 1071-1023, 0022-5355

Additional searchable ISSN (electronic): 1520-8567, 2166-2754, 2327-9877

AVS Science and Technology Society, United States of America

Scopus rating (2023): CiteScore 2.7 SJR 0.328 SNIP 0.702

Journal

Titles
  • Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena(2010 → …)
  • Journal of vacuum science & technology : JVST ; B, Microelectronics and nanometer structures(1991 → 2010)
  • Journal of vacuum science & technology : JVST ; B, Microelectronics processing and phenomena(1983 → 1990)
  • Journal of vacuum science & technology : the official journal of the American Vacuum Society(1964 → 1982)
  • Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Additional searchable titlesJ. Vac. Sci. Technol. B, JVTBD9, J. Vac. Sci. Technol., J of Vacuum Sci. Technol., Microelectronics and nanometer structures, JVST B, Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Journal of Vacuum Science and Technology B
ISSNs2166-2746, 1071-1023, 0022-5355
Additional searchable ISSN (electronic)1520-8567, 2166-2754, 2327-9877
PublisherAVS Science and Technology Society
Country/TerritoryUnited States of America
Scopus ID28597
ZDB-ID1475429-0
Linking ISSN0734-211X
ZDB-ID2212422-6
ZDB-ID3117333-0

Keywords

ASJC Scopus subject areas

Library keywords

Related content

Direct writing immersion laser lithography on graphene monolayers using two-photon absorption

Zhang, J., Strobel, C., Estel, K., Mikolajick, T. & Kirchner, R., 1 Dec 2023, In: Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena. 41, 6, 11 p., 062604.

Research output: Contribution to journal › Research article › Contributed › peer-review

Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN

Krückeberg, L., Wirth, S., Solovyev, V. V., Großer, A., Kukushkin, I. V., Mikolajick, T. & Schmult, S., Jul 2020, In: Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena. 38, 4, 042203.

Research output: Contribution to journal › Research article › Contributed › peer-review

Multi-staged deposition of trench-gate oxides for power MOSFETs

Neuber, M., Storbeck, O., Langner, M., Stahrenberg, K. & Mikolajick, T., May 2019, In: Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena. 37, 032202.

Research output: Contribution to journal › Research article › Contributed › peer-review

Magneto-optical confirmation of Landau level splitting in a GaN/AlGaN 2DEG grown on bulk GaN

Schmult, S., Solovyev, V. V., Wirth, S., Großer, A., Mikolajick, T. & Kukushkin, I. V., Mar 2019, In: Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena. 37, 2, 021210.

Research output: Contribution to journal › Research article › Contributed › peer-review

Normally-off operating GaN-based pseudovertical MOSFETs with MBE grown source region

Hentschel, R., Schmult, S., Wachowiak, A., Grosser, A., Gaertner, J. & Mikolajick, T., 2018, In: Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena. 36, 2, 02D109.

Research output: Contribution to journal › Research article › Contributed › peer-review

View all research output (16)