Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
ISSNs: 2166-2746, 1071-1023
Additional searchable ISSN (electronic): 1520-8567, 2166-2754
AIP Publishing , United States of America
Scopus rating (2022): CiteScore 3 SJR 0.4 SNIP 0.704
Journal
| Titles |
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|---|---|
| Additional searchable titles | Journal of Vacuum Science & Technology B, Microelectronics and nanometer structures, JVST B, Nanotechnology and microelectronics, Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Journal of vacuum science & technology : JVST ; an AVS journal. B, Microelectronics and nanometer structures |
| ISSNs | 2166-2746, 1071-1023 |
| Additional searchable ISSN (electronic) | 1520-8567, 2166-2754 |
| Publisher | AIP Publishing |
| Country/Territory | United States of America |
| Linking ISSN | 1071-1023 |
| ZDB-ID | 3117331-7 |
| ZDB-ID | 797726-8 |
| Scopus ID | 28597 |
| ZDB-ID | 3117333-0 |