Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
ISSNs: 2166-2746, 1071-1023, 0022-5355
Additional searchable ISSN (electronic): 1520-8567, 2166-2754, 2327-9877
AVS Science and Technology Society, United States of America
Scopus rating (2023): CiteScore 2.7 SJR 0.328 SNIP 0.702
Journal
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| Additional searchable titles | J. Vac. Sci. Technol. B, JVTBD9, J. Vac. Sci. Technol., J of Vacuum Sci. Technol., Microelectronics and nanometer structures, JVST B, Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Journal of Vacuum Science and Technology B |
| ISSNs | 2166-2746, 1071-1023, 0022-5355 |
| Additional searchable ISSN (electronic) | 1520-8567, 2166-2754, 2327-9877 |
| Publisher | AVS Science and Technology Society |
| Country/Territory | United States of America |
| Scopus ID | 28597 |
| ZDB-ID | 1475429-0 |
| Linking ISSN | 0734-211X |
| ZDB-ID | 2212422-6 |
| ZDB-ID | 3117333-0 |