Scanning spreading resistance microscopy for failure analysis of nLDMOS devices with decreased breakdown voltage

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • S. Doering - (Author)
  • R. Rudolf - (Author)
  • M. Pinkert - (Author)
  • H. Roetz - (Author)
  • C. Wagner - (Author)
  • S. Eckl - (Author)
  • M. Strasser - (Author)
  • A. Wachowiak - (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original languageEnglish
Pages (from-to)2128-2132
JournalMicroelectronics Reliability
Volume54
Issue number9-10
Publication statusPublished - 2014
Peer-reviewedYes

External IDs

Scopus 84908507451

Keywords

Library keywords