Scanning Spreading Resistance Microscopy analysis of locally blocked implant sites

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • S. Doering - (Author)
  • A. Wachowiak - (Author)
  • U. Winkler - (Author)
  • M. Richter - (Author)
  • J. Goehler - (Author)
  • H. Roetz - (Author)
  • S. Eckl - (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original languageEnglish
Pages (from-to) 77-81
JournalMicroelectronic Engineering
Volume122
Publication statusPublished - 2014
Peer-reviewedYes

External IDs

Scopus 84900534628

Keywords

Library keywords