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Research Portal of the TU Dresden

Microelectronic Engineering

ISSNs: 0167-9317

Elsevier Science B.V., Netherlands

Scopus rating (2025): CiteScore 7.4 SJR 0.595 SNIP 1.076

Journal

Titles	Microelectronic Engineering
Additional searchable titles	Microelectronic engineering, Microelectronic engineering : an international journal of semiconductor manufacturing technology
ISSNs	0167-9317
Publisher	Elsevier Science B.V.
Country/Territory	Netherlands
ZDB-ID	605230-7
ZDB-ID	1497065-X

Keywords

ASJC Scopus subject areas

Library keywords

620 Engineering and allied operations

Related content

Research output

Impact of Bias temperature instability on reconfigurable field effect transistors and circuits

Galderisi, G., Mikolajick, T. & Trommer, J., 15 Nov 2025, In: Microelectronic Engineering. 300, 9 p., 112374.

Research output: Contribution to journal › Research article › Contributed › peer-review

Characterization of self-assembled monolayers for Cu-Cu bonding technology

Lykova, M., Langer, E., Hinrichs, K., Panchenko, J., Meyer, J., Künzelmann, U. & Wolf, M. J. & 1 others, Lang, K. D., 16 Oct 2018, In: Microelectronic Engineering. 202, p. 19-24 6 p.

Research output: Contribution to journal › Research article › Contributed › peer-review

Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size

Abbarchi, M., Naffouti, M., Lodari, M., Salvalaglio, M., Backofen, R., Bottein, T. & Voigt, A. & 10 others, David, T., Claude, J.-B., Bouabdellaoui, M., Benkouider, A., Fraj, I., Favre, L., Ronda, A., Berbezier, I., Grosso, D. & Bollani, M., 15 Apr 2018, In: Microelectronic Engineering. 190, p. 1-6 6 p.

Research output: Contribution to journal › Research article › Contributed › peer-review

Development of electrically conductive microstructures based on polymer/CNT nanocomposites via two-photon polymerization

Staudinger, U., Zyla, G., Krause, B., Janke, A., Fischer, D., Esen, C. & Voit, B. & 1 others, Ostendorf, A., 5 Jul 2017, In: Microelectronic Engineering. 179, p. 48-55 8 p.

Research output: Contribution to journal › Research article › Contributed › peer-review

Optimizing process conditions for improved Hf_1 − xZrxO₂ ferroelectric capacitor performance

Mittmann, T., Fengler, F. P. G., Richter, C., Park, M. H., Mikolajick, T. & Schroeder, U., 2017, In: Microelectronic Engineering. 178, p. 48-51 4 p.

Research output: Contribution to journal › Research article › Contributed › peer-review

View all research output (28)