Optimizing process conditions for improved Hf<inf>1 − x</inf>Zr<inf>x</inf>O<inf>2</inf>ferroelectric capacitor performance

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Details

Original languageEnglish
Pages (from-to)48-51
Number of pages4
JournalMicroelectronic Engineering
Volume178
Publication statusPublished - 2017
Peer-reviewedYes

External IDs

Scopus 85018359703

Keywords

Library keywords