OLED compatible water-based nanolaminate encapsulation systems using ozone based starting layer

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

A. Singh - , TUD Dresden University of Technology (Author)
F. Nehm - , Chair of Opto-Electronics (Author)
L. Müller-Meskamp - , Chair of Opto-Electronics (Author)
C. Hossbach - , Chair of Semiconductors (Author)
M. Albert - , Institute of Semiconductors and Microsystems (Author)
U. Schroeder - , TUD Dresden University of Technology (Author)
K. Leo - , Chair of Opto-Electronics (Author)
T. Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)

Scopus	84905304710
ORCID	/0000-0003-3814-0378/work/142256110

Encapsulation, Water and ozone based diffusion barriers, Atomic layer deposition, Permeation barrier, Flexible electronics