Non-Destructive Imaging of Organosilicate Glass (OSG) Thin Films at Low Voltage With the EsB Detector

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Elham Moayedi - (Author)
  • Ruediger Rosenkranz - (Author)
  • Andre Clausner - (Author)
  • Khashayar Pakbaz - (Author)
  • Ehrenfried Zschech - , Fraunhofer Institute for Ceramic Technologies and Systems (Author)
  • Maria Aranzazu Garitagoitia Cid - , Dresden Center for Nanoanalysis (DCN) (Author)

Details

Original languageEnglish
Pages (from-to)461-464
Number of pages4
JournalIEEE transactions on device and materials reliability
Volume16
Issue number4
Publication statusPublished - 1 Dec 2016
Peer-reviewedYes

External IDs

Scopus 85005950837

Keywords

Research priority areas of TU Dresden

Library keywords