Microprinting process development enabling cost effective, high density and flexible electro-optical integration
Research output: Contribution to book/conference proceedings/anthology/report › Conference contribution › Contributed › peer-review
Contributors
Abstract
To overcome the interconnect bottlenecks of chip-to-chip (C2C) data communication, we aim for an electro-optical integration approach combining electrical and optical interconnects for contacting and routing signals in electronic systems. This paper describes the development of additive microprinting manufacturing processes for the fabrication of optical routing and coupling using the multi-lithography approach with UV-lithography, two-photon direct laser writing (2PP-DLW) and UV nano-imprinting (UV-NIL). Multimode and single-mode application scenarios for micro-structuring of ORMOCER® hybrid polymers and 2PP printing resins are discussed: the multichannel and multimode flexible optical links for 5G/6G base stations servers and the E/O-hybrid interposer for SiN-based photonic enabled trusted electronics with single-mode planar BEOL optics. The advances in 2PP-DLW and UV-NIL processes are described and the influence of processing parameters on the quality of manufactured optics is evaluated in the paper.
Details
Original language | German |
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Title of host publication | 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) |
Publisher | IEEE |
Pages | 1790-1796 |
Number of pages | 7 |
ISBN (electronic) | 9798350375985 |
ISBN (print) | 979-8-3503-7599-2 |
Publication status | Published - 31 May 2024 |
Peer-reviewed | Yes |
Conference
Title | 2024 IEEE 74th Electronic Components and Technology Conference |
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Abbreviated title | ECTC 2024 |
Conference number | 74 |
Duration | 28 - 31 May 2024 |
Location | Gaylord Rockies Resort & Convention Center |
City | Denver |
Country | United States of America |
External IDs
Scopus | 85197703076 |
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ORCID | /0000-0002-0757-3325/work/165062965 |
Keywords
Keywords
- Optical device fabrication, Optical interconnections, Printing, Routing, Servers, Waveguide lasers, Writing