Low-thermal budget flash light annealing for Al2O3 surface passivation

Low-thermal budget flash light annealing for Al₂O₃ surface passivation

Research output: Contribution to journal › Research article › Contributed › peer-review

D.K. Simon - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
T. Henke - , Chair of Semiconductors, Center for Advancing Electronics Dresden (cfaed) (Author)
P.M. Jordan - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
F.P.G. Fengler - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
T. Mikolajick - , Chair of Nanoelectronics, Center for Advancing Electronics Dresden (cfaed), NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
J.W. Bartha - , Chair of Semiconductors, Center for Advancing Electronics Dresden (cfaed) (Author)
I. Dirnstorfer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Original language	English
Pages (from-to)	631-635
Number of pages	5
Journal	Physica Status Solidi - Rapid Research Letters
Volume	9
Issue number	11
Publication status	Published - 2015
Peer-reviewed	Yes

Scopus	84951869162