Low Temperature Solid State Bonding of Cu-In Fine-Pitch Interconnects
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Cu-In fine pitch interconnects are a viable approach for low temperature bonding technologies in 2.5 D and 3D integration. The unique metallurgical phenomena regarding the phase formation and growth of intermetallic compounds (IMCs) in the Cu-In system affect both processing conditions and the resulting interconnection properties. In this work, we investigate the formation Cu-In joints below 150 °C, i.e. in the solid state, under ambient conditions. Dies with Cu interconnects and In caps (25 μm diameter, 55 μm pitch) were bonded in a flip-chip process at moderate pressures and subsequently investigated by means of mechanical testing, cross-sectioning and microstructural analysis. In particular, we reveal the presence of stable interconnects exhibiting a ductile bonding zone. The resulting die shear strengths are in the range of 15-20 MPa.
Details
| Original language | English |
|---|---|
| Title of host publication | 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 1-5 |
| Number of pages | 5 |
| ISBN (print) | 978-1-7281-6294-2 |
| Publication status | Published - 18 Sept 2020 |
| Peer-reviewed | Yes |
Conference
| Title | 8th IEEE Electronics System-Integration Technology Conference |
|---|---|
| Abbreviated title | ESTC 2020 |
| Conference number | 8 |
| Duration | 15 - 18 September 2020 |
| City | Tonsberg, Vestfold |
| Country | Norway |
External IDs
| Scopus | 85096621621 |
|---|---|
| ORCID | /0000-0001-8576-7611/work/165877215 |
Keywords
Keywords
- Bonding, Scanning electron microscopy, Microscopy, Liquids, Shearing, Plating, Photomicrography