Low Temperature Solid State Bonding of Cu-In Fine-Pitch Interconnects

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

Cu-In fine pitch interconnects are a viable approach for low temperature bonding technologies in 2.5 D and 3D integration. The unique metallurgical phenomena regarding the phase formation and growth of intermetallic compounds (IMCs) in the Cu-In system affect both processing conditions and the resulting interconnection properties. In this work, we investigate the formation Cu-In joints below 150 °C, i.e. in the solid state, under ambient conditions. Dies with Cu interconnects and In caps (25 μm diameter, 55 μm pitch) were bonded in a flip-chip process at moderate pressures and subsequently investigated by means of mechanical testing, cross-sectioning and microstructural analysis. In particular, we reveal the presence of stable interconnects exhibiting a ductile bonding zone. The resulting die shear strengths are in the range of 15-20 MPa.

Details

Original languageEnglish
Title of host publication2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1-5
Number of pages5
ISBN (print)978-1-7281-6294-2
Publication statusPublished - 18 Sept 2020
Peer-reviewedYes

Conference

Title8th IEEE Electronics System-Integration Technology Conference
Abbreviated titleESTC 2020
Conference number8
Duration15 - 18 September 2020
CityTonsberg, Vestfold
CountryNorway

External IDs

Scopus 85096621621
ORCID /0000-0001-8576-7611/work/165877215

Keywords

Keywords

  • Bonding, Scanning electron microscopy, Microscopy, Liquids, Shearing, Plating, Photomicrography