Low Temperature Solid State Bonding of Cu-In Fine-Pitch Interconnects

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

Cu-In fine pitch interconnects are a viable approach for low temperature bonding technologies in 2.5 D and 3D integration. The unique metallurgical phenomena regarding the phase formation and growth of intermetallic compounds (IMCs) in the Cu-In system affect both processing conditions and the resulting interconnection properties. In this work, we investigate the formation Cu-In joints below 150 °C, i.e. in the solid state, under ambient conditions. Dies with Cu interconnects and In caps (25 μm diameter, 55 μm pitch) were bonded in a flip-chip process at moderate pressures and subsequently investigated by means of mechanical testing, cross-sectioning and microstructural analysis. In particular, we reveal the presence of stable interconnects exhibiting a ductile bonding zone. The resulting die shear strengths are in the range of 15-20 MPa.

Details

OriginalspracheEnglisch
Titel2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC)
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seiten1-5
Seitenumfang5
ISBN (Print)978-1-7281-6294-2
PublikationsstatusVeröffentlicht - 18 Sept. 2020
Peer-Review-StatusJa

Konferenz

Titel8th IEEE Electronics System-Integration Technology Conference
KurztitelESTC 2020
Veranstaltungsnummer8
Dauer15 - 18 September 2020
StadtTonsberg, Vestfold
LandNorwegen

Externe IDs

Scopus 85096621621
ORCID /0000-0001-8576-7611/work/165877215

Schlagworte

Schlagwörter

  • Bonding, Scanning electron microscopy, Microscopy, Liquids, Shearing, Plating, Photomicrography