Low Temperature Solid State Bonding of Cu-In Fine-Pitch Interconnects
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Cu-In fine pitch interconnects are a viable approach for low temperature bonding technologies in 2.5 D and 3D integration. The unique metallurgical phenomena regarding the phase formation and growth of intermetallic compounds (IMCs) in the Cu-In system affect both processing conditions and the resulting interconnection properties. In this work, we investigate the formation Cu-In joints below 150 °C, i.e. in the solid state, under ambient conditions. Dies with Cu interconnects and In caps (25 μm diameter, 55 μm pitch) were bonded in a flip-chip process at moderate pressures and subsequently investigated by means of mechanical testing, cross-sectioning and microstructural analysis. In particular, we reveal the presence of stable interconnects exhibiting a ductile bonding zone. The resulting die shear strengths are in the range of 15-20 MPa.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC) |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seiten | 1-5 |
| Seitenumfang | 5 |
| ISBN (Print) | 978-1-7281-6294-2 |
| Publikationsstatus | Veröffentlicht - 18 Sept. 2020 |
| Peer-Review-Status | Ja |
Konferenz
| Titel | 8th IEEE Electronics System-Integration Technology Conference |
|---|---|
| Kurztitel | ESTC 2020 |
| Veranstaltungsnummer | 8 |
| Dauer | 15 - 18 September 2020 |
| Stadt | Tonsberg, Vestfold |
| Land | Norwegen |
Externe IDs
| Scopus | 85096621621 |
|---|---|
| ORCID | /0000-0001-8576-7611/work/165877215 |
Schlagworte
Schlagwörter
- Bonding, Scanning electron microscopy, Microscopy, Liquids, Shearing, Plating, Photomicrography