Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Maik Simon - , Chair of Nanoelectronics (Author)
Ryo Mizuta - , University of Cambridge (Author)
Ye Fan - , University of Cambridge (Author)
Alexander Tahn - , Dresden Center for Nanoanalysis (DCN) (Author)
Darius Pohl - , Dresden Center for Nanoanalysis (DCN) (Author)
Jens Trommer - , Faculty of Electrical and Computer Engineering (Author)
Stephan Hofmann - , University of Cambridge (Author)
Thomas Mikolajick - , Chair of Nanoelectronics, Center for Advancing Electronics Dresden (cfaed), TUD Dresden University of Technology (Author)
Walter M Weber - (Author)