This thesis reports the inspection and manipulation of thin ferroelectric films of lead titanate (PbTiO3 : PTO), lead zirconium titanate (Pb(Zr0,25Ti0,75O3 : PZT) and barium titanate (BaTiO3 : BTO) by means of scanning force microscopy - specifically Piezoresponse- and Kelvin-Probe. The film thickness of the investigated samples ranged between 50 nm and 800 nm. This experimental work focussed on the following issues: native domain structures, creation of domains by short voltage pulses and area-switching with the force microscope, local qualitative and quantitative measurements of the ferroelectric hysteresis loops, and investigations at the interface between film and platinum-electrode in the PZT/Pt--System. \nLamellar domain structures were visualized with high lateral resolution of 50 nm on the surface of the PTO-samples, whereas the PZT- and BTO-samples showed prepolarisation and no domains. In the switching experiments a pronounced thickness dependence was found and partly a good agreement to macroscopic measurements. For BTO-films of 50 nm and 125 nm thickness no stable switching of polarisation could be observed. Using appropriate preparation methods it was possible to provide evidence of a 200 nm thick interface layer with reduced polarisation above the electrode in the PZT/Pt-system.\n