Local dielectric and polarization properties of inner and outer interfaces in PZT thin films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • L. M. Eng - , Chair of Experimental Physics / Photophysics (Author)
  • S. Grafström - , TUD Dresden University of Technology (Author)
  • C. Loppacher - , TUD Dresden University of Technology (Author)
  • X. M. Lu - , Nanjing University (Author)
  • F. Schlaphof - , TUD Dresden University of Technology (Author)
  • K. Franke - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • O. Suchaneck - , TUD Dresden University of Technology (Author)
  • G. Gerlach - , Institute of Solid State Electronics (Author)

Abstract

We report on novel approaches using scanning force methods [i.e. piezoresponse force microscopy (PFM), Kelvin probe force microscopy (KPFM) and pull-off force spcctroscopy (PFS)] in order to deduce the local dielectric and polarization properties of PZT thin films both at outer and inner interfaces with a lateral resolution <50 nm. We show that the polarization profile into the depth of the PZT sample varies dramatically being built up at the bottom Pt electrode over a transition layer of more than 200 nm in thickness. The results are explained both in the view of negatively charged defects pinned at the PZT/Pt interface as well as the possible variation in the local dielectric properties across the film thickness. Investigating the latter made the quantitative deduction of values such as the effective dielectric polarization P z the deposited charge density σ, and the surface dielectric constant ε surface in thin ferroelectric PZT films necessary. We illustrate that such measurements in fact are possible on the nanometer scale revealing quantitative data when combining PFM and PFS.

Details

Original languageEnglish
Pages (from-to)13-21
Number of pages9
JournalIntegrated Ferroelectrics
Volume62
Publication statusPublished - 2004
Peer-reviewedYes

External IDs

ORCID /0000-0002-2484-4158/work/175744140
ORCID /0000-0002-7062-9598/work/175744666

Keywords

Keywords

  • Atomic force microscopy, Dielectric polarization, Dielectric thin films, Ferroelectrics