Integration of molecular-layer-deposited aluminum alkoxide interlayers into inorganic nanolaminate barriers for encapsulation of organic electronics with improved stress resistance

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Details

Original languageEnglish
Article number01A119
JournalJournal of Vacuum Science & Technology A
Volume33
Issue number1
Publication statusPublished - Jan 2015
Peer-reviewedYes

External IDs

Scopus 84910071881
ORCID /0000-0003-3814-0378/work/142256109

Keywords