Integration of molecular-layer-deposited aluminum alkoxide interlayers into inorganic nanolaminate barriers for encapsulation of organic electronics with improved stress resistance
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
Original language | English |
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Article number | 01A119 |
Journal | Journal of Vacuum Science & Technology A |
Volume | 33 |
Issue number | 1 |
Publication status | Published - Jan 2015 |
Peer-reviewed | Yes |
External IDs
Scopus | 84910071881 |
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ORCID | /0000-0003-3814-0378/work/142256109 |