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In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Johanna Reif - , Institute of Semiconductors and Microsystems (Author)
Martin Knaut - , Chair of Semiconductors (Author)
Sebastian Killge - , Professor (rtd.) for Semiconductors, Institute of Semiconductors and Microsystems (Author)
Felix Winkler - , Institute of Semiconductors and Microsystems, Professor (rtd.) for Semiconductors, Chair of Semiconductors (Author)
Matthias Albert - , Chair of Semiconductors (Author)
Johann W. Bartha - , Institute of Semiconductors and Microsystems (Author)

Details

Original language	English
Journal	Journal of vacuum science & technology : JVST ; A, Vacuum, surfaces, and films
Volume	38
Issue number	1
Publication status	Published - Jan 2020
Peer-reviewed	Yes

External IDs

Scopus	85077445776

Keywords