Impact of the interface layer on the cycling behaviour and retention of ferroelectric hafnium oxide

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Maximilian Lederer - , Chair of Experimental Physics / Photophysics, Fraunhofer Institute for Photonic Microsystems (Author)
  • Konstantin Mertens - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Alireza M. Kia - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Jennifer Emara - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ricardo Olivo - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Yannick Raffel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kati Kühnel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Lukas M. Eng - , Chair of Experimental Physics / Photophysics, TUD Dresden University of Technology (Author)

Abstract

Abstract: Reliability is a central aspect of hafnium oxide-based ferroelectric field effect transistors (FeFETs), which are promising candidates for embedded non-volatile memories. Besides the device performance, understanding the evolution of the ferroelectric behaviour of hafnium oxide over its lifetime in FeFETs is of major importance for further improvements. Here, we present the impact of the interface layer in FeFETs on the cycling behaviour and retention of ferroelectric silicon-doped hafnium oxide. Thicker interfaces are demonstrated to reduce the presence of antiferroelectric-like wake-up effects and to improve endurance. However, they show a strong destabilisation of one polarisation state in terms of retention. In addition, measurements of the Preisach density revealed additional insight in the wake-up effect of these metal-ferroelectric-insulator-semiconductor (MFIS) capacitors. Graphic abstract: [Figure not available: see fulltext.]

Details

Original languageEnglish
Pages (from-to)525-529
Number of pages5
JournalMRS advances
Volume6
Issue number21
Publication statusPublished - Aug 2021
Peer-reviewedYes

External IDs

ORCID /0000-0002-2484-4158/work/142257583