Impact of the interface layer on the cycling behaviour and retention of ferroelectric hafnium oxide

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Maximilian Lederer - , Professur für Experimentalphysik/Photophysik, Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Konstantin Mertens - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Alireza M. Kia - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Jennifer Emara - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Ricardo Olivo - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Yannick Raffel - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Tarek Ali - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Kati Kühnel - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Autor:in)
  • Lukas M. Eng - , Professur für Experimentalphysik/Photophysik, Technische Universität Dresden (Autor:in)

Abstract

Abstract: Reliability is a central aspect of hafnium oxide-based ferroelectric field effect transistors (FeFETs), which are promising candidates for embedded non-volatile memories. Besides the device performance, understanding the evolution of the ferroelectric behaviour of hafnium oxide over its lifetime in FeFETs is of major importance for further improvements. Here, we present the impact of the interface layer in FeFETs on the cycling behaviour and retention of ferroelectric silicon-doped hafnium oxide. Thicker interfaces are demonstrated to reduce the presence of antiferroelectric-like wake-up effects and to improve endurance. However, they show a strong destabilisation of one polarisation state in terms of retention. In addition, measurements of the Preisach density revealed additional insight in the wake-up effect of these metal-ferroelectric-insulator-semiconductor (MFIS) capacitors. Graphic abstract: [Figure not available: see fulltext.]

Details

OriginalspracheEnglisch
Seiten (von - bis)525-529
Seitenumfang5
FachzeitschriftMRS advances
Jahrgang6
Ausgabenummer21
PublikationsstatusVeröffentlicht - Aug. 2021
Peer-Review-StatusJa

Externe IDs

ORCID /0000-0002-2484-4158/work/142257583