Evaluation of the electrical and physical properties of thin calcium titanate high-k insulators for capacitor applications

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

A. Krause - , Chair of Theory of Artistic Creation and Psychology of Art, Institute of Art and Music (Author)
W. Weber - , TUD Dresden University of Technology (Author)
A. Jahn - , Chair of Nuclear Physics (Author)
D. Pohl - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
B. Rellinghaus - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
U. Schroeder - (Author)
J. Heitmann - (Author)
T. Mikolajick - , Chair of Nanoelectronics (Author)

Original language	English
Journal	Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
Volume	29
Issue number	1
Publication status	Published - 1 Jan 2011
Peer-reviewed	Yes