Embedding of Thinned RF Chips and Electrical Redistribution Layer Characterization

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

The demand for flexible electronic packaging technologies enabling reliable flexible high-frequency applications is increasing. Embedding of fully integrated wireless transceivers (mm-wave ICs - MMIC) operating at high frequencies needs to be developed. As part of this, to ensure the required embedding technology and the direct contact technology have a proper performance, it is necessary to perform electrical characterization of the embedded chips. In this paper, 1 × 1 mm2 sized silicon test chips with daisy chains were designed and built on thin 200 μm Si-wafer. Subsequently, test chips were embedded in SMC for electrical tests and, in the future, high frequency characterization. The RDL layer is constructed by means of a semi-additive procedure to connect RDL test pads with the daisy chain consisting of chip-level pads and traces, RDL through vias and traces. Metallization is done by PVD and galvanic plating. Measurements were performed primarily to verify a proper interconnection between the metal lines of the RDL layer and the pads on the embedded chip. The resistance-based characterization shows promising results, indicating the interconnects from the embedded chip to the RDL using Cu pillars to be less sensitive against process uncertainties and better defined compared to flip-chip bonding with Au stud- bumps, verifying the prospect of this novel fabrication technique.

Details

Original languageEnglish
Title of host publicationProceedings of the 24th Electronics Packaging Technology Conference, EPTC 2022
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages52-56
Number of pages5
ISBN (electronic)9798350398854
ISBN (print)979-8-3503-9886-1
Publication statusPublished - 9 Dec 2022
Peer-reviewedYes

Conference

Title24th Electronics Packaging Technology Conference
Abbreviated titleEPTC 2022
Conference number24
Duration7 - 9 December 2022
CitySingapore
CountrySingapore

External IDs

Scopus 85147433631
ORCID /0000-0002-0757-3325/work/139064821
ORCID /0000-0001-9720-0727/work/192581558

Keywords

Keywords

  • Fabrication, Metallization, Semiconductor device measurement, Transmission line measurements, Uncertainty, Wireless communication, Wireless sensor networks, embedded chip packaging, flexible electronics redistribution layer (RDL), RF, sheet molding compound