Demonstration and Endurance Improvement of p-channel Hafnia-based Ferroelectric Field Effect Transistors

Research output: Contribution to conferencesPaperContributedpeer-review

Contributors

Abstract

So far, only CMOS compatible and scalable hafnia-zirconia (HZO) based ferroelectric (FE) n-FeFETs have been reported. To enable the full ferroelectric hierarchy [1] both p- and n-type devices should be available. Here we report a p-FeFET with a large memory window (MW) for the first time. Moreover, we propose different integration schemes comprising structures with and without internal gate resulting in metal-FE-insulator-Si (MFIS) and metal-FE-metal-insulator-Si (MFMIS) devices which could be used to tackle the problem of interface (IF) degradation and possibly decrease the power consumption of the devices.

Details

Original languageEnglish
Pages51-52
Number of pages2
Publication statusPublished - Jun 2019
Peer-reviewedYes

Conference

Title2019 Device Research Conference, DRC 2019
Duration23 - 26 June 2019
CityAnn Arbor
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/142256219

Keywords

ASJC Scopus subject areas