Demonstration and Endurance Improvement of p-channel Hafnia-based Ferroelectric Field Effect Transistors
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Abstract
So far, only CMOS compatible and scalable hafnia-zirconia (HZO) based ferroelectric (FE) n-FeFETs have been reported. To enable the full ferroelectric hierarchy [1] both p- and n-type devices should be available. Here we report a p-FeFET with a large memory window (MW) for the first time. Moreover, we propose different integration schemes comprising structures with and without internal gate resulting in metal-FE-insulator-Si (MFIS) and metal-FE-metal-insulator-Si (MFMIS) devices which could be used to tackle the problem of interface (IF) degradation and possibly decrease the power consumption of the devices.
Details
Original language | English |
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Pages | 51-52 |
Number of pages | 2 |
Publication status | Published - Jun 2019 |
Peer-reviewed | Yes |
Conference
Title | 2019 Device Research Conference, DRC 2019 |
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Duration | 23 - 26 June 2019 |
City | Ann Arbor |
Country | United States of America |
External IDs
ORCID | /0000-0003-3814-0378/work/142256219 |
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