Demonstration and Endurance Improvement of p-channel Hafnia-based Ferroelectric Field Effect Transistors
Publikation: Beitrag zu Konferenzen › Paper › Beigetragen › Begutachtung
Beitragende
Abstract
So far, only CMOS compatible and scalable hafnia-zirconia (HZO) based ferroelectric (FE) n-FeFETs have been reported. To enable the full ferroelectric hierarchy [1] both p- and n-type devices should be available. Here we report a p-FeFET with a large memory window (MW) for the first time. Moreover, we propose different integration schemes comprising structures with and without internal gate resulting in metal-FE-insulator-Si (MFIS) and metal-FE-metal-insulator-Si (MFMIS) devices which could be used to tackle the problem of interface (IF) degradation and possibly decrease the power consumption of the devices.
Details
Originalsprache | Englisch |
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Seiten | 51-52 |
Seitenumfang | 2 |
Publikationsstatus | Veröffentlicht - Juni 2019 |
Peer-Review-Status | Ja |
Konferenz
Titel | 2019 Device Research Conference, DRC 2019 |
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Dauer | 23 - 26 Juni 2019 |
Stadt | Ann Arbor |
Land | USA/Vereinigte Staaten |
Externe IDs
ORCID | /0000-0003-3814-0378/work/142256219 |
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