Correlation between the macroscopic ferroelectric material properties of Si:HfO<inf>2</inf>and the statistics of 28 nm FeFET memory arrays

Research output: Contribution to journalResearch articleContributedpeer-review

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Details

Original languageEnglish
Pages (from-to)42-51
Number of pages10
JournalFerroelectrics
Volume497
Issue number1
Publication statusPublished - 2016
Peer-reviewedYes

External IDs

Scopus 84969567622