Control of unintentional oxygen incorporation in GaN
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Article number | 02B104 |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 35 |
| Issue number | 2 |
| Publication status | Published - 2017 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85012898782 |
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