Control of unintentional oxygen incorporation in GaN

Research output: Contribution to journal › Research article › Contributed › peer-review

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Details

Original languageEnglish
Article number02B104
Journal Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
Volume35
Issue number2
Publication statusPublished - 2017
Peer-reviewedYes

External IDs

Scopus 85012898782

Keywords

Library keywords