Characterization of gas permeability of polymer membranes for encapsulation of 2D-material sensors
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
Gas sensors with high sensitivity are crucial for a large amount of applications. This paper shows a sensor packaging concept for highly sensitive 2D-materials such as black phosphorus (BP) or molybdenum disulfide (MoS2). The material needs on the one hand shielding against gases, which will rapidly degrade the material, such as oxygen; on the other hand, a sufficient contact of the measuring gas to function as sensor. For this purpose, flexible packaging should provide semipermeable membranes on the sensor active area. The development of a gas permeation chamber for permeation tests of polymers and sensor test within a sample gas atmosphere is presented in the paper, together with 2D-material sensor characterization.
Details
Original language | English |
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Title of host publication | 2021 44th International Spring Seminar on Electronics Technology, ISSE 2021 |
Publisher | IEEE Computer Society, Washington |
ISBN (electronic) | 9781665414777 |
Publication status | Published - 5 May 2021 |
Peer-reviewed | Yes |
Publication series
Series | International Spring Seminar on Electronics Technology (ISSE) |
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Volume | 2021-May |
ISSN | 2161-2528 |
Conference
Title | 2021 44th International Spring Seminar on Electronics Technology |
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Subtitle | Advancements in Microelectronics Packaging for Harsh Environment |
Abbreviated title | ISSE 2021 |
Conference number | 44 |
Duration | 5 - 7 May 2021 |
Location | online |
City | Dresden |
Country | Germany |
External IDs
ORCID | /0000-0002-0757-3325/work/139064770 |
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