Characterization of gas permeability of polymer membranes for encapsulation of 2D-material sensors

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

Gas sensors with high sensitivity are crucial for a large amount of applications. This paper shows a sensor packaging concept for highly sensitive 2D-materials such as black phosphorus (BP) or molybdenum disulfide (MoS2). The material needs on the one hand shielding against gases, which will rapidly degrade the material, such as oxygen; on the other hand, a sufficient contact of the measuring gas to function as sensor. For this purpose, flexible packaging should provide semipermeable membranes on the sensor active area. The development of a gas permeation chamber for permeation tests of polymers and sensor test within a sample gas atmosphere is presented in the paper, together with 2D-material sensor characterization.

Details

Original languageEnglish
Title of host publication2021 44th International Spring Seminar on Electronics Technology, ISSE 2021
PublisherIEEE Computer Society, Washington
ISBN (electronic)9781665414777
Publication statusPublished - 5 May 2021
Peer-reviewedYes

Publication series

SeriesInternational Spring Seminar on Electronics Technology (ISSE)
Volume2021-May
ISSN2161-2528

Conference

Title2021 44th International Spring Seminar on Electronics Technology
SubtitleAdvancements in Microelectronics Packaging for Harsh Environment
Abbreviated titleISSE 2021
Conference number44
Duration5 - 7 May 2021
Locationonline
CityDresden
CountryGermany

External IDs

ORCID /0000-0002-0757-3325/work/139064770