Characterization of gas permeability of polymer membranes for encapsulation of 2D-material sensors
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Gas sensors with high sensitivity are crucial for a large amount of applications. This paper shows a sensor packaging concept for highly sensitive 2D-materials such as black phosphorus (BP) or molybdenum disulfide (MoS2). The material needs on the one hand shielding against gases, which will rapidly degrade the material, such as oxygen; on the other hand, a sufficient contact of the measuring gas to function as sensor. For this purpose, flexible packaging should provide semipermeable membranes on the sensor active area. The development of a gas permeation chamber for permeation tests of polymers and sensor test within a sample gas atmosphere is presented in the paper, together with 2D-material sensor characterization.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2021 44th International Spring Seminar on Electronics Technology, ISSE 2021 |
| Herausgeber (Verlag) | IEEE Computer Society, Washington |
| ISBN (elektronisch) | 9781665414777 |
| Publikationsstatus | Veröffentlicht - 5 Mai 2021 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | International Spring Seminar on Electronics Technology (ISSE) |
|---|---|
| Band | 2021-May |
| ISSN | 2161-2528 |
Konferenz
| Titel | 2021 44th International Spring Seminar on Electronics Technology |
|---|---|
| Untertitel | Advancements in Microelectronics Packaging for Harsh Environment |
| Kurztitel | ISSE 2021 |
| Veranstaltungsnummer | 44 |
| Dauer | 5 - 7 Mai 2021 |
| Ort | online |
| Stadt | Dresden |
| Land | Deutschland |
Externe IDs
| ORCID | /0000-0002-0757-3325/work/139064770 |
|---|