Characterization of gas permeability of polymer membranes for encapsulation of 2D-material sensors

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

Gas sensors with high sensitivity are crucial for a large amount of applications. This paper shows a sensor packaging concept for highly sensitive 2D-materials such as black phosphorus (BP) or molybdenum disulfide (MoS2). The material needs on the one hand shielding against gases, which will rapidly degrade the material, such as oxygen; on the other hand, a sufficient contact of the measuring gas to function as sensor. For this purpose, flexible packaging should provide semipermeable membranes on the sensor active area. The development of a gas permeation chamber for permeation tests of polymers and sensor test within a sample gas atmosphere is presented in the paper, together with 2D-material sensor characterization.

Details

OriginalspracheEnglisch
Titel2021 44th International Spring Seminar on Electronics Technology, ISSE 2021
Herausgeber (Verlag)IEEE Computer Society, Washington
ISBN (elektronisch)9781665414777
PublikationsstatusVeröffentlicht - 5 Mai 2021
Peer-Review-StatusJa

Publikationsreihe

ReiheInternational Spring Seminar on Electronics Technology (ISSE)
Band2021-May
ISSN2161-2528

Konferenz

Titel2021 44th International Spring Seminar on Electronics Technology
UntertitelAdvancements in Microelectronics Packaging for Harsh Environment
KurztitelISSE 2021
Veranstaltungsnummer44
Dauer5 - 7 Mai 2021
Ortonline
StadtDresden
LandDeutschland

Externe IDs

ORCID /0000-0002-0757-3325/work/139064770