Characterization of Embedded and Thinned RF Chips
Research output: Contribution to journal › Conference article › Contributed › peer-review
Contributors
Abstract
This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm. Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.
Details
| Original language | English |
|---|---|
| Pages (from-to) | 410-415 |
| Number of pages | 6 |
| Journal | Advancing Microelectronics |
| Volume | 2023 |
| Issue number | EMPC |
| Publication status | Published - Sept 2023 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0003-2197-6080/work/212487954 |
|---|---|
| ORCID | /0000-0001-6778-7846/work/212489809 |
| ORCID | /0000-0002-0757-3325/work/212489906 |
| ORCID | /0000-0001-9720-0727/work/212490092 |
| ORCID | /0000-0003-1319-0870/work/212490917 |
Keywords
ASJC Scopus subject areas
Keywords
- chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line