Characterization of Embedded and Thinned RF Chips
Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Beigetragen › Begutachtung
Beitragende
Abstract
This work studies the effect of thinning down chips with transmission line structures for flexible embedding technology. Test chips with 90 Ω grounded coplanar waveguide (G-CPW) transmission lines have been designed and manufactured to characterize the high-frequency performance before and after embedding in sheet molding compound (SMC), and thinning down from 300 µm to 20 µm. Molding first technology enables single-die or multiple-die thinning with the embedding material while being held in the exact position, where the subsequent fan-out copper (Cu) redistribution layer (RDL) structuring realizes the direct contacts to the embedded chip, followed by semi-additive manufacturing of traces. The embedded and thinned chips are characterized by S-parameter measurements in the frequency range from 20 MHz to 65 GHz using a vector network analyzer (VNA). The results show the feasibility of the examined embedding and thinning processes which are suitable for millimeter wave (mmWave) components as shown by the example of a G-CPW transmission line without degrading its RF performance in terms of characteristic impedance and attenuation.
Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 410-415 |
| Seitenumfang | 6 |
| Fachzeitschrift | Advancing Microelectronics |
| Jahrgang | 2023 |
| Ausgabenummer | EMPC |
| Publikationsstatus | Veröffentlicht - Sept. 2023 |
| Peer-Review-Status | Ja |
Externe IDs
| ORCID | /0000-0003-2197-6080/work/212487954 |
|---|---|
| ORCID | /0000-0001-6778-7846/work/212489809 |
| ORCID | /0000-0002-0757-3325/work/212489906 |
| ORCID | /0000-0001-9720-0727/work/212490092 |
| ORCID | /0000-0003-1319-0870/work/212490917 |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- chip embedding, chip thinning, flexible packaging, millimeter wave, tactile internet, transmission line