Breakdown and Protection of ALD Moisture Barrier Thin Films
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Pages (from-to) | 22121-22127 |
| Number of pages | 7 |
| Journal | ACS applied materials & interfaces |
| Volume | 7 |
| Issue number | 40 |
| Publication status | Published - 14 Oct 2015 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 84944338762 |
|---|---|
| ORCID | /0000-0003-3814-0378/work/142256108 |
Keywords
Keywords
- water vapor, barrier, encapsulation, atomic layer deposition, corrosion, WVTR