IEEE Transactions on Semiconductor Manufacturing
ISSNs: 0894-6507
Additional searchable ISSN (electronic): 1558-2345
Institute of Electrical and Electronics Engineers Inc.
Scopus rating (2023): CiteScore 5.2 SJR 0.967 SNIP 1.237
Journal
| Titles |
|
|---|---|
| Additional searchable titles | IEEE Trans Semicond Man, IEEE Trans Semicond Manuf |
| ISSNs | 0894-6507 |
| Additional searchable ISSN (electronic) | 1558-2345 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ZDB-ID | 166215-6 |
| ZDB-ID | 2035198-7 |