Variants of Ferroelectric Hafnium Oxide based Nonvolatile Memories

Research output: Contribution to conferencesPaperContributedpeer-review

Contributors

  • T. Mikolajick - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • H. Mulaosmanovic - , TUD Dresden University of Technology (Author)
  • M. Hoffmann - , TUD Dresden University of Technology (Author)
  • B. Max - , Chair of Nanoelectronics, TUD Dresden University of Technology (Author)
  • T. Mittmann - , TUD Dresden University of Technology (Author)
  • Uwe Schroeder - , TUD Dresden University of Technology (Author)
  • Stefan Slesazeck - , TUD Dresden University of Technology (Author)

Abstract

Ferroelectricity is very attractive for nonvolatile memories since it allows non-volatility paired with a field driven switching mechanism enabling a very low-power write operation. Non-volatile memories based on ferroelectric lead-zirconium-titanate (PZT) (see fig. la) are available on the market for more than a quarter of a century now [1]. Yet they are limited to niche applications due to the compatibility issues of the ferroelectric material with CMOS processes and the associated limited scalability [2]. The discovery of ferroelectricity in doped hafnium oxide has revived the activities towards a variety of scalable ferroelectric nonvolatile memory devices [3].

Details

Original languageEnglish
Pages207-208
Number of pages2
Publication statusPublished - Jun 2019
Peer-reviewedYes

Conference

Title2019 Device Research Conference
Abbreviated titleDRC 2019
Duration23 - 26 June 2019
Degree of recognitionInternational event
LocationUniversity of Michigan, Ann Arbor
CityAnn Arbor
CountryUnited States of America

External IDs

ORCID /0000-0003-3814-0378/work/142256218

Keywords

ASJC Scopus subject areas