Variants of Ferroelectric Hafnium Oxide based Nonvolatile Memories
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Abstract
Ferroelectricity is very attractive for nonvolatile memories since it allows non-volatility paired with a field driven switching mechanism enabling a very low-power write operation. Non-volatile memories based on ferroelectric lead-zirconium-titanate (PZT) (see fig. la) are available on the market for more than a quarter of a century now [1]. Yet they are limited to niche applications due to the compatibility issues of the ferroelectric material with CMOS processes and the associated limited scalability [2]. The discovery of ferroelectricity in doped hafnium oxide has revived the activities towards a variety of scalable ferroelectric nonvolatile memory devices [3].
Details
| Original language | English |
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| Pages | 207-208 |
| Number of pages | 2 |
| Publication status | Published - Jun 2019 |
| Peer-reviewed | Yes |
Conference
| Title | 2019 Device Research Conference |
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| Abbreviated title | DRC 2019 |
| Duration | 23 - 26 June 2019 |
| Degree of recognition | International event |
| Location | University of Michigan, Ann Arbor |
| City | Ann Arbor |
| Country | United States of America |
External IDs
| ORCID | /0000-0003-3814-0378/work/142256218 |
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