Using Raman spectroscopy and x-ray diffraction for phase determination in ferroelectric mixed Hf1-xZrxO2-based layers

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Ridham Sachdeva - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Bohan Xu - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Monica Materano - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Author)
  • Alfred Kersch - , Munich University of Applied Sciences (Author)

Abstract

The discovery of ferroelectric properties in the doped HfO2 and mixed Hf1-xZrxO2 systems made precise phase determination very important. However, due to the similarities of the diffraction peaks between the tetragonal and the orthorhombic phases, the discrimination of these two critical phases by x-ray diffraction remains challenging. This work introduces Raman spectroscopy as a structural characterization method to unambiguously identify phases by comparing experimental data with density functional simulation results for the mixed hafnia-zirconia system in the complete composition range. Raman modes for the non-polar monoclinic and tetragonal phases are presented in comparison to those of the polar orthorhombic phase. Changes in phonon mode frequencies in the hafnia-zirconia system with Hf/Zr composition are related to the appearance of ferroelectric properties.

Details

Original languageEnglish
Article number214104
Number of pages13
JournalJournal of applied physics
Volume132
Issue number21
Publication statusPublished - 7 Dec 2022
Peer-reviewedYes

External IDs

WOS 000893229200020
unpaywall 10.1063/5.0119871

Keywords

DFG Classification of Subject Areas according to Review Boards

Subject groups, research areas, subject areas according to Destatis

ASJC Scopus subject areas

Keywords

  • Bilbao crystallographic server, Zro2