Using Raman spectroscopy and x-ray diffraction for phase determination in ferroelectric mixed Hf1-xZrxO2-based layers
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
The discovery of ferroelectric properties in the doped HfO2 and mixed Hf1-xZrxO2 systems made precise phase determination very important. However, due to the similarities of the diffraction peaks between the tetragonal and the orthorhombic phases, the discrimination of these two critical phases by x-ray diffraction remains challenging. This work introduces Raman spectroscopy as a structural characterization method to unambiguously identify phases by comparing experimental data with density functional simulation results for the mixed hafnia-zirconia system in the complete composition range. Raman modes for the non-polar monoclinic and tetragonal phases are presented in comparison to those of the polar orthorhombic phase. Changes in phonon mode frequencies in the hafnia-zirconia system with Hf/Zr composition are related to the appearance of ferroelectric properties.
Details
Original language | English |
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Article number | 214104 |
Number of pages | 13 |
Journal | Journal of applied physics |
Volume | 132 |
Issue number | 21 |
Publication status | Published - 7 Dec 2022 |
Peer-reviewed | Yes |
External IDs
WOS | 000893229200020 |
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unpaywall | 10.1063/5.0119871 |
ORCID | /0000-0003-3814-0378/work/142256254 |
Keywords
Research priority areas of TU Dresden
DFG Classification of Subject Areas according to Review Boards
Subject groups, research areas, subject areas according to Destatis
ASJC Scopus subject areas
Keywords
- Bilbao crystallographic server, Zro2