Using Raman spectroscopy and x-ray diffraction for phase determination in ferroelectric mixed Hf1-xZrxO2-based layers

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Ridham Sachdeva - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Bohan Xu - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Monica Materano - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Alfred Kersch - , Hochschule München University of Applied Sciences (Autor:in)

Abstract

The discovery of ferroelectric properties in the doped HfO2 and mixed Hf1-xZrxO2 systems made precise phase determination very important. However, due to the similarities of the diffraction peaks between the tetragonal and the orthorhombic phases, the discrimination of these two critical phases by x-ray diffraction remains challenging. This work introduces Raman spectroscopy as a structural characterization method to unambiguously identify phases by comparing experimental data with density functional simulation results for the mixed hafnia-zirconia system in the complete composition range. Raman modes for the non-polar monoclinic and tetragonal phases are presented in comparison to those of the polar orthorhombic phase. Changes in phonon mode frequencies in the hafnia-zirconia system with Hf/Zr composition are related to the appearance of ferroelectric properties.

Details

OriginalspracheEnglisch
Aufsatznummer214104
Seitenumfang13
FachzeitschriftJournal of applied physics
Jahrgang132
Ausgabenummer21
PublikationsstatusVeröffentlicht - 7 Dez. 2022
Peer-Review-StatusJa

Externe IDs

WOS 000893229200020
unpaywall 10.1063/5.0119871
ORCID /0000-0003-3814-0378/work/142256254

Schlagworte

Fächergruppen, Lehr- und Forschungsbereiche, Fachgebiete nach Destatis

ASJC Scopus Sachgebiete

Schlagwörter

  • Bilbao crystallographic server, Zro2

Bibliotheksschlagworte