Trapped charge densities in Al2O3-based silicon surface passivation layers

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Details

Original languageEnglish
Article number215306
JournalJournal of applied physics
Volume119
Publication statusPublished - 7 Jun 2016
Peer-reviewedYes

External IDs

Scopus 84974555884

Keywords

Library keywords