Towards wake-up free ferroelectrics and scaling: Al-doped HZO and its crystallographic texture

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Ayse Sünbül - , Fraunhofer Institute for Photonic Microsystems (Author)
  • David Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Amir Pourjafar - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Shouzhuo Yang - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Franz Müller - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Ricardo Olivo - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Thomas Kämpfe - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Konrad Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Lukas Eng - , Institute of Applied Physics, Chair of Experimental Physics / Photophysics (Author)
  • Maximilian Lederer - , Institute of Applied Physics, Fraunhofer Institute for Photonic Microsystems (Author)

Abstract

Ferroelectric (FE) hafnium zirconium oxide (HZO) is an excellent candidate for data storage applications. However, it has some reliability limitations such as imprint and retention. Herein, we explore Al doping of HZO to overcome these limitations. FE behavior is tuned by the aluminum (Al) concentrations in the films and by annealing temperature. A correlation is done between electrical behavior, crystallographic texture, and FE phases determined by grazing-incidence X-ray diffraction (GIXRD) measurements. Reduced coercive field (2Ec) values and wake-up free HZO-based ferroelectrics are explored. We show the tunability of remanent polarization (2Pr) and 2Ec with respect to Al-doping concentration and anneal temperature, hence crystallographic texture.

Details

Original languageEnglish
Article number100110
Number of pages5
JournalMemories - Materials, Devices, Circuits and Systems
Volume8 (2024)
Publication statusPublished - 7 May 2024
Peer-reviewedYes

External IDs

ORCID /0000-0002-2484-4158/work/175744102

Keywords

Keywords

  • Crystallographic texture, Ferroelectric, Hafnium oxide, Scaling