Thermally activated crystallization of Nb 2O 5 grown on Pt electrode

Research output: Contribution to journalResearch articleContributedpeer-review


  • L. Berger - , Freiberg University of Mining and Technology (Author)
  • H. Mähne - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • V. Klemm - , Freiberg University of Mining and Technology (Author)
  • A. Leuteritz - , Freiberg University of Mining and Technology (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • D. Rafaja - , Freiberg University of Mining and Technology (Author)


The influence of the local crystallographic orientation of the polycrystalline bottom platinum electrode on the crystallization of niobium pentoxide thin films during their rapid thermal annealing was investigated by X-ray diffraction, X-ray reflectivity and transmission electron microscopy. The Nb 2O 5 thin films under study were reactively sputtered in a mixed O 2/Ar atmosphere and subsequently subjected to the annealing in argon atmosphere at temperatures ranging from 500 °C to 700 °C. The X-ray diffraction confirmed a transition from the amorphous niobium oxide to the crystalline orthorhombic Nb 2O 5 for temperatures between 500 °C and 600 °C. The X-ray reflectivity measurements showed that the crystallization process was accompanied by a continuous increase of the electron density in Nb 2O 5 and by a rapid increase of the surface roughness at 700 °C. It was further observed by transmission electron microscopy that Nb 2O 5 crystallizes selectively and that the crystalline domains of Nb 2O 5 possess a strong orientation relationship to the platinum from the bottom electrode. The orientation relationship (111)Pt ||(160)Nb 2O 5 was identified as the most beneficial one for crystallization of Nb 2O 5.


Original languageEnglish
Pages (from-to)431-437
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Issue number2
Publication statusPublished - Aug 2012

External IDs

ORCID /0000-0003-3814-0378/work/142256325


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