Thermally activated crystallization of Nb 2O 5 grown on Pt electrode

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung


  • L. Berger - , Technische Universität Bergakademie Freiberg (Autor:in)
  • H. Mähne - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • V. Klemm - , Technische Universität Bergakademie Freiberg (Autor:in)
  • A. Leuteritz - , Technische Universität Bergakademie Freiberg (Autor:in)
  • T. Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • D. Rafaja - , Technische Universität Bergakademie Freiberg (Autor:in)


The influence of the local crystallographic orientation of the polycrystalline bottom platinum electrode on the crystallization of niobium pentoxide thin films during their rapid thermal annealing was investigated by X-ray diffraction, X-ray reflectivity and transmission electron microscopy. The Nb 2O 5 thin films under study were reactively sputtered in a mixed O 2/Ar atmosphere and subsequently subjected to the annealing in argon atmosphere at temperatures ranging from 500 °C to 700 °C. The X-ray diffraction confirmed a transition from the amorphous niobium oxide to the crystalline orthorhombic Nb 2O 5 for temperatures between 500 °C and 600 °C. The X-ray reflectivity measurements showed that the crystallization process was accompanied by a continuous increase of the electron density in Nb 2O 5 and by a rapid increase of the surface roughness at 700 °C. It was further observed by transmission electron microscopy that Nb 2O 5 crystallizes selectively and that the crystalline domains of Nb 2O 5 possess a strong orientation relationship to the platinum from the bottom electrode. The orientation relationship (111)Pt ||(160)Nb 2O 5 was identified as the most beneficial one for crystallization of Nb 2O 5.


Seiten (von - bis)431-437
FachzeitschriftApplied Physics A: Materials Science and Processing
PublikationsstatusVeröffentlicht - Aug. 2012

Externe IDs

ORCID /0000-0003-3814-0378/work/142256325