The Electrode-Ferroelectric Interface as the Primary Constraint on Endurance and Retention in HZO-Based Ferroelectric Capacitors

Research output: Contribution to journalResearch articleInvitedpeer-review

Contributors

  • Ruben Alcala - , NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Monica Materano - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Pramoda Vishnumurthy - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Wassim Hamouda - , Helmholtz Centre Berlin for Materials and Energy, Université Paris-Saclay (Author)
  • Catherine Dubourdieu - , Helmholtz Centre Berlin for Materials and Energy, Free University of Berlin (Author)
  • Alfred Kersch - , Munich University of Applied Sciences (Author)
  • Nicolas Barrett - , Université Paris-Saclay (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

Ferroelectric hafnium-zirconium oxide is one of the most relevant CMOS-compatible materials for next-generation, non-volatile memory devices. Nevertheless, performance reliability remains an issue. With TiN electrodes (the most reported electrode material), Hf-Zr-based ferroelectric capacitors struggle to provide reliable retention due to electrode-ferroelectric interface interactions. Although Hf-Zr-based ferroelectric capacitors are fabricated with other electrodes, the focus is predominantly directed toward obtaining a large ferroelectric response. The impact of the electrodes on data retention for these ferroelectrics remains underreported and greater insight is needed to improve device reliability. Here, a comprehensive set of electrodes are evaluated with emphasis on the core ferroelectric memory reliability metrics of endurance, retention, and imprint. Metal-ferroelectric-metal capacitors comprised of a Hf0.5Zr0.5O2 layer deposited between different combinations of nitride (TiN, TiAlN, and NbN), pure metal (W), and oxide (MoO2, RuO2, and IrO2) top and bottom electrodes are fabricated for the investigation. From the electrical, physical, and structural analysis, the low reactivity of the electrode with the ferroelectric is found to be key for improved reliability of the ferroelectric capacitor. This understanding of interface properties provides necessary insight for the broad implementation of Hf-Zr-based ferroelectrics in memory technology and, overall, boosts the development of next-generation memories.

Details

Original languageEnglish
Article number2303261
JournalAdvanced functional materials
Volume33
Issue number43
Publication statusPublished - 18 Oct 2023
Peer-reviewedYes

External IDs

Mendeley 1dae2e27-1035-3de2-8b21-3e6b31fd2b61
ORCID /0000-0003-3814-0378/work/145224908
WOS 001016081800001

Keywords

DFG Classification of Subject Areas according to Review Boards

Subject groups, research areas, subject areas according to Destatis

Keywords

  • capacitors, electrode materials, ferroelectricity, HfO, reliability, ZrO, ZrO2, HfO2, Electrode materials, Ferroelectricity, Capacitors, Reliability