The Electrode-Ferroelectric Interface as the Primary Constraint on Endurance and Retention in HZO-Based Ferroelectric Capacitors

Publikation: Beitrag in FachzeitschriftForschungsartikelEingeladenBegutachtung

Beitragende

  • Ruben Alcala - , NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Monica Materano - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Pramoda Vishnumurthy - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Wassim Hamouda - , Helmholtz Centre Berlin for Materials and Energy, Université Paris-Saclay (Autor:in)
  • Catherine Dubourdieu - , Helmholtz Centre Berlin for Materials and Energy, Freie Universität (FU) Berlin (Autor:in)
  • Alfred Kersch - , Hochschule München University of Applied Sciences (Autor:in)
  • Nicolas Barrett - , Université Paris-Saclay (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

Ferroelectric hafnium-zirconium oxide is one of the most relevant CMOS-compatible materials for next-generation, non-volatile memory devices. Nevertheless, performance reliability remains an issue. With TiN electrodes (the most reported electrode material), Hf-Zr-based ferroelectric capacitors struggle to provide reliable retention due to electrode-ferroelectric interface interactions. Although Hf-Zr-based ferroelectric capacitors are fabricated with other electrodes, the focus is predominantly directed toward obtaining a large ferroelectric response. The impact of the electrodes on data retention for these ferroelectrics remains underreported and greater insight is needed to improve device reliability. Here, a comprehensive set of electrodes are evaluated with emphasis on the core ferroelectric memory reliability metrics of endurance, retention, and imprint. Metal-ferroelectric-metal capacitors comprised of a Hf0.5Zr0.5O2 layer deposited between different combinations of nitride (TiN, TiAlN, and NbN), pure metal (W), and oxide (MoO2, RuO2, and IrO2) top and bottom electrodes are fabricated for the investigation. From the electrical, physical, and structural analysis, the low reactivity of the electrode with the ferroelectric is found to be key for improved reliability of the ferroelectric capacitor. This understanding of interface properties provides necessary insight for the broad implementation of Hf-Zr-based ferroelectrics in memory technology and, overall, boosts the development of next-generation memories.

Details

OriginalspracheEnglisch
Aufsatznummer2303261
FachzeitschriftAdvanced functional materials
Jahrgang33
Ausgabenummer43
PublikationsstatusVeröffentlicht - 18 Okt. 2023
Peer-Review-StatusJa

Externe IDs

Mendeley 1dae2e27-1035-3de2-8b21-3e6b31fd2b61
ORCID /0000-0003-3814-0378/work/145224908
WOS 001016081800001

Schlagworte

Fächergruppen, Lehr- und Forschungsbereiche, Fachgebiete nach Destatis

Schlagwörter

  • capacitors, electrode materials, ferroelectricity, HfO, reliability, ZrO, ZrO2, HfO2, Electrode materials, Ferroelectricity, Capacitors, Reliability