Substrate handling techniques for thin wafer processing

Research output: Contribution to book/Conference proceedings/Anthology/ReportChapter in book/Anthology/ReportContributedpeer-review

Contributors

  • Christof Landesberger - , Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Sabine Scherbaum - , Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)
  • Karlheinz Bock - , Chair of Electronic Packaging Technology, Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT) (Author)

Abstract

This chapter describes the necessity that carrier techniques be developed for thin wafer handling and processing. After an explanation on the main requirements for handle substrate techniques, we give an overview on the following temporary bonding techniques and mechanisms: thermoplastic adhesives, release layers, soluble glues, reversible tapes, mechanical debonding and electrostatic bonding. Finally, we conclude that the development of appropriate carrier techniques for ultra-thin wafers represents a key element of future thin wafer technology.

Details

Original languageEnglish
Title of host publicationUltra-thin Chip Technology and Applications
PublisherSpringer New York
Pages125-138
Number of pages14
ISBN (print)9781441972750
Publication statusPublished - 2011
Peer-reviewedYes

External IDs

ORCID /0000-0002-0757-3325/work/139064946

Keywords

ASJC Scopus subject areas