Substrate handling techniques for thin wafer processing
Research output: Contribution to book/Conference proceedings/Anthology/Report › Chapter in book/Anthology/Report › Contributed › peer-review
Contributors
Abstract
This chapter describes the necessity that carrier techniques be developed for thin wafer handling and processing. After an explanation on the main requirements for handle substrate techniques, we give an overview on the following temporary bonding techniques and mechanisms: thermoplastic adhesives, release layers, soluble glues, reversible tapes, mechanical debonding and electrostatic bonding. Finally, we conclude that the development of appropriate carrier techniques for ultra-thin wafers represents a key element of future thin wafer technology.
Details
Original language | English |
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Title of host publication | Ultra-thin Chip Technology and Applications |
Publisher | Springer New York |
Pages | 125-138 |
Number of pages | 14 |
ISBN (print) | 9781441972750 |
Publication status | Published - 2011 |
Peer-reviewed | Yes |
External IDs
ORCID | /0000-0002-0757-3325/work/139064946 |
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