Strain as a Global Factor in Stabilizing the Ferroelectric Properties of ZrO2

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Bohan Xu - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Alfred Kersch - , Munich University of Applied Sciences (Author)
  • Tony Schenk - , NaMLab - Nanoelectronic materials laboratory gGmbH, Ferroelectric Memory GmbH (Author)
  • Claudia Richter - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • Chris M. Fancher - , Oak Ridge National Laboratory (Author)
  • Sergej Starschich - , RWTH Aachen University (Author)
  • Fenja Berg - , RWTH Aachen University (Author)
  • Peter Reinig - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kristina M. Holsgrove - , Queen's University Belfast (Author)
  • Takanori Kiguchi - , Tohoku University, Kumamoto University (Author)
  • Thomas Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH, TUD Dresden University of Technology (Author)
  • Ulrich Boettger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Abstract

Since the discovery of ferroelectricity in doped HfO2 and ZrO2 thin films over a decade ago, fluorite-structured ferroelectric thin films have attracted much research attention due to their excellent scalability and complementary metal-oxide semiconductor compatibility compared to conventional perovskite ferroelectric materials. Although various factors influencing the formation of the ferroelectric properties are identified, a clear understanding of the causes of the phase formation have been difficult to determine. In this work, ZrO2 films deposited by atomic layer deposition and chemical solution deposition have resulted in films with completely different structural properties. Regardless of these differences, a general relationship between strain and phase formation is established, leading to a more unified understanding of ferroelectric phase formation in undoped ZrO2 films, which can be applied to other fluorite-structured films.

Details

Original languageEnglish
Article number2311825
Pages (from-to)1-11
Number of pages11
JournalAdvanced functional materials
Volume34
Issue number8
Publication statusPublished - 10 Nov 2023
Peer-reviewedYes

External IDs

ORCID /0000-0003-3814-0378/work/168719197

Keywords

Keywords

  • ferroelectricity, strain, stress, thin film, zirconia

Library keywords