Strain as a Global Factor in Stabilizing the Ferroelectric Properties of ZrO2

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Bohan Xu - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Tony Schenk - , NaMLab - Nanoelectronic materials laboratory gGmbH, Ferroelectric Memory Company (Autor:in)
  • Claudia Richter - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Chris M. Fancher - , Oak Ridge National Laboratory (Autor:in)
  • Sergej Starschich - , Rheinisch-Westfälische Technische Hochschule Aachen (Autor:in)
  • Fenja Berg - , Rheinisch-Westfälische Technische Hochschule Aachen (Autor:in)
  • Peter Reinig - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Kristina M. Holsgrove - , Queen's University Belfast (Autor:in)
  • Takanori Kiguchi - , Tohoku University, Kumamoto University (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Ulrich Boettger - , Fraunhofer-Institut für Photonische Mikrosysteme (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

Since the discovery of ferroelectricity in doped HfO2 and ZrO2 thin films over a decade ago, fluorite-structured ferroelectric thin films have attracted much research attention due to their excellent scalability and complementary metal-oxide semiconductor compatibility compared to conventional perovskite ferroelectric materials. Although various factors influencing the formation of the ferroelectric properties are identified, a clear understanding of the causes of the phase formation have been difficult to determine. In this work, ZrO2 films deposited by atomic layer deposition and chemical solution deposition have resulted in films with completely different structural properties. Regardless of these differences, a general relationship between strain and phase formation is established, leading to a more unified understanding of ferroelectric phase formation in undoped ZrO2 films, which can be applied to other fluorite-structured films.

Details

OriginalspracheEnglisch
Aufsatznummer2311825
Seiten (von - bis)1-11
Seitenumfang11
FachzeitschriftAdvanced functional materials
Jahrgang34
Ausgabenummer8
PublikationsstatusVeröffentlicht - 10 Nov. 2023
Peer-Review-StatusJa

Externe IDs

ORCID /0000-0003-3814-0378/work/168719197

Schlagworte