Si amorphization by focused ion beam milling: Point defect model with dynamic BCA simulation and experimental validation
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Pages (from-to) | 52-56 |
| Number of pages | 5 |
| Journal | Ultramicroscopy |
| Volume | 184 |
| Publication status | Published - 2018 |
| Peer-reviewed | Yes |
External IDs
| Scopus | 85032337802 |
|---|