Ruthenium(ii) carbonyl amidates – a new class of precursors for atomic layer deposition

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Jorit Obenlüneschloß - , Ruhr University Bochum (Author)
  • Cara Lena Nies - , University College Cork (Author)
  • Michael Gock - , Heraeus Precious Metals GmbH & Co. KG (Author)
  • Michael Unkrig-Bau - , Heraeus Precious Metals GmbH & Co. KG (Author)
  • Jan Niklas Huster - , Ruhr University Bochum (Author)
  • Michael Nolan - , University College Cork (Author)
  • Anjana Devi - , Chair of Materials Chemistry (gB/IFW), Ruhr University Bochum, Leibniz Institute for Solid State and Materials Research Dresden (Author)

Abstract

Ru-based thin films are essential for electronics and catalysis. Their growth through atomic layer deposition (ALD) depends on precursors that balance reactivity, volatility, and thermal stability. We present the first Ru dicarbonyl bisamidate complexes as a new and promising class of ALD precursors for Ru-based materials. Modifying the substitution pattern of the amidate ligands yielded [Ru(CO)2(N-sBuiPrAD)2], as a volatile liquid precursor with excellent thermal properties. First principles simulations predict favorable interactions with common ALD co-reactants, indicating its potential for thin film deposition.

Details

Original languageEnglish
Pages (from-to)4046-4050
Number of pages5
JournalDalton transactions
Volume55
Issue number10
Publication statusPublished - 10 Mar 2026
Peer-reviewedYes

External IDs

PubMed 41601179

Keywords

ASJC Scopus subject areas