Ruthenium(ii) carbonyl amidates – a new class of precursors for atomic layer deposition
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Ru-based thin films are essential for electronics and catalysis. Their growth through atomic layer deposition (ALD) depends on precursors that balance reactivity, volatility, and thermal stability. We present the first Ru dicarbonyl bisamidate complexes as a new and promising class of ALD precursors for Ru-based materials. Modifying the substitution pattern of the amidate ligands yielded [Ru(CO)2(N-sBuiPrAD)2], as a volatile liquid precursor with excellent thermal properties. First principles simulations predict favorable interactions with common ALD co-reactants, indicating its potential for thin film deposition.
Details
| Original language | English |
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| Pages (from-to) | 4046-4050 |
| Number of pages | 5 |
| Journal | Dalton transactions |
| Volume | 55 |
| Issue number | 10 |
| Publication status | Published - 10 Mar 2026 |
| Peer-reviewed | Yes |
External IDs
| PubMed | 41601179 |
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