RF-Magnetron Sputtered Dielectric Backside Passivation

Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed

Contributors

  • F. Benner - , NaMLab - Nanoelectronic materials laboratory gGmbH (Author)
  • M. Tarasova - (Author)
  • P. Moll - (Author)
  • S. Jakschik - (Author)
  • I. Dirnstorfer - (Author)
  • M. Knaut - , Chair of Semiconductors (Author)
  • T. Mikolajick - , Chair of Nanoelectronics, NaMLab - Nanoelectronic materials laboratory gGmbH (Author)

Details

Original languageEnglish
Title of host publicationProceedings of the 26th European Photovoltaic Solar Energy Conference
Publication statusPublished - 2011
Peer-reviewedNo

External IDs

ORCID /0000-0003-3814-0378/work/142256338

Keywords

Keywords

  • Al2O3, SiO2, PVD, ALD, photovoltaic, solar cell passivation