Repetitive nonlinear control for linear scanning micro mirrors

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

  • Richard Schroedter - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Markus Schwarzenberg - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Jan Grahmann - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Thilo Sandner - , Fraunhofer Institute for Electronic Nano Systems (Author)
  • Klaus Janschek - , Chair of Automation Engineering (Author)

Abstract

Various scanning applications like LIDAR sensors, OCT systems and laser projectors require a repeated periodic linear scanning trajectory performed by a quasi-static micro mirror. Since most MOEMS systems have inherent nonlinearities like a progressive spring stiffness and the quadratic voltage-deflection-relation of electrostatic drives, a nonlinear control scheme as presented in our previous paper significantly reduces parasitic oscillations of the resonance frequency and enables a high resolution raster scan combining a quasi-static axis with a cardanic mounted resonant axis. In this paper we address a novel control scheme using a flatness-based feedback control enhanced by a plug-in repetitive controller for the linear scanning axis. We demonstrate the applicability of this feedback control for a quasi-static moving micro mirror with electrostatic staggered vertical comb drives using a microcontroller-based driver. On-chip piezoresistive sensors serve as position feedback. We compare different scan trajectories and repetition rates with respect to the linearity and repeatability showing the robustness of the proposed control regime. Furthermore we discuss the advantage of this method to reduce the individual chip characterization for ramping up mass production.

Details

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVII
EditorsYong-Hwa Park, Hans Zappe, Wibool Piyawattanametha
PublisherSPIE - The international society for optics and photonics, Bellingham
Number of pages8
ISBN (electronic)9781510615755
Publication statusPublished - 2018
Peer-reviewedYes

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume10545
ISSN0277-786X

Conference

TitleConference on MOEMS and Miniaturized Systems XVII
Duration30 - 31 January 2018
CitySan Francisco
CountryCanada

External IDs

Scopus 85049516362
ORCID /0000-0003-3259-4571/work/142249649

Keywords

Keywords

  • electrostatic, micro mirror, nonlinear closed-loop control, piezoresistive sensor, quasi-static, repetitive, staggered vertical comb drive